An investigation on thermoelastic damping of high-Q ring resonators

Geometric effects on thermoelastic damping in MEMS resonators

The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that reduces the dimensionality of the prob...

Thermoelastic Damping in Flexural-mode Ring Gyroscopes

This paper provides a comprehensive derivation for thermoelastic damping (TED) in flexural-mode ring gyroscopes, in light of recent efforts to design high rateresolution gyroscopes. Imposing an upper limit on the attainable mechanical noise floor of a vibratory gyroscope, thermoelastic damping in a ring gyroscope is extracted from the equations of linear thermoelasticity. By assuming that it is...

Suppression of thermoelastic damping in MEMS beam resonators by piezoresistivity

Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such...

Damping mechanisms in high-Q micro and nanomechanical string resonators

Finite Element Analysis of Thermoelastic Damping in Contour-Mode Vibrations of Micro- and Nanoscale Ring, Disk, and Elliptical Plate Resonators

Thermoelastic damping in contour-mode in-plane vibrations of rings, disks, and elliptical plates is investigated on various size scales, using a reduced finite element formulation. The Fourier scheme is applied to the axisymmetric geometries including circular rings and disks, and is found to be remarkably efficient in searching solutions. The numerical accuracy is further improved by the imple...